Materials

Coatings

  • LIB materials
    • LLZO, LPS, LGPS, LiPON, Li, Si, C, LTO, LCO, …
  • Metals
    • Cu, Au, Pt, Pd, Al, Sn, Ni, Li, Nb, …
  • Oxides
    • Al2O3, TiO2, WO3, SnO2, SiO2, …
  • Nitrides
    • Si3N4, BN, TiN, …
  • Micro and nano-composites using combinatorial process (e.g. Si particles in carbon matrix)

Substrates

Practically any vacuum compatible material without evaporating components can be coated in the PLD process. The product can be thin membrane or powder, sheet, block or a piece with more complex shape.